Decrease in gap states at ultrathin SiO2/Si interfaces by crown-ether cyanide treatment

Applied Physics Letters

Volumn 77, Issue 26, 2000, Pages 4392-4394

  Kobayashi, Hikaru ^a   Asano, Akira ^a   Takahashi, Masao ^a   Yoneda, Kenji ^b   Todokoro, Yoshihiro ^b  

^a OSAKA UNIVERSITY   (Japan)

^b PANASONIC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001621089     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1332982     Document Type: Article

References (19)

1. M. L. Reed and J. D. Plummer, J. Appl. Phys. 63, 5776 (1988).
2. T. W. Hickmott, J. Appl. Phys. 48, 723 (1977).
3. Y. Nissan-Cohen, Appl. Surf. Sci. 39, 511 (1989).
4. K. L. Brower and S. M. Myers, Appl. Phys. Lett. 57, 162 (1990).
5. S. M. Myer, J. Appl. Phys. 61, 5428 (1987).
6. P. J. Caplan, E. H. Poindexter, B. E. Deal, and R. R. Razouk, J. Appl. Phys. 50, 5847 (1979).
7. F. B. Mclean, IEEE Trans. Nucl. Sci. NS-27, 1651 (1980).
8. R. E. Stahlbush, B. J. Mrstik, and R. K. Lawrence, IEEE Trans. Nucl. Sci. 37, 1641 (1990).
9. D. L. Griscom, J. Electron. Mater. 21, 763 (1992).
10. H. Kobayashi, A. Asano, S. Asada, T. Kubota, Y. Yamashita, K. Yoneda, and Y. Todokoro, J. Appl. Phys. 83, 2098 (1998).
11. H. Kobayashi, S. Tachibana, K. Yamanaka, Y. Nakato, and K. Yoneda, J. Appl. Phys. 81, 7630 (1997).
12. H. Kobayashi, S. Tachibana, Y. Nakato, and K. Yoneda, J. Electrochem. Soc. 144, 2893 (1997).
13. E. H. Nicollian and J. R. Brews, MOS (Metal Oxide Semiconductor) Physics and Technology (Wiley, New York, 1982).
14. T. Ishida, H. Kouno, H. Kobayashi, and Y. Nakato, J. Electrochem. Soc. 141, 1357 (1994).
15. H. Kobayashi, Y. Kogetsu, T. Ishida, and Y. Nakato, J. Appl. Phys. 74, 4756 (1993).
16. Y. Nakatsuji, T. Nakamura, M. Yonetani, H. Yuya, and M. Okahara, J. Am. Chem. Soc. 110, 531 (1988).
17. E. H. Nicollian and A. Goetzberger, Bell Syst. Tech. J. 46, 1055 (1967).
18. H. C. Card, Solid-State Electron. 20, 971 (1977).
19. S. M. Sze, Physics of Semiconductor Devices, 2nd ed. (Wiley, New York, 1981).