Diffusion barrier and electrical characteristics of a self-aligned MgO layer obtained from a Cu(Mg) alloy film

Applied Physics Letters

Volumn 77, Issue 14, 2000, Pages 2192-2194

  Lee, W H ^a   Cho, H L ^a   Cho, B S ^a   Kim, J Y ^a   Nam, W J ^a   Kim, Y S ^a   Jung, W G ^a   Kwon, H ^a   Lee, J H ^a   Lee, J G ^a   Reucroft, P J ^b   Lee, C M ^c   Lee, E G ^d  

^a Kookmin University   (South Korea)

^b UNIVERSITY OF KENTUCKY   (United States)

^c Inha University   (South Korea)

^d Chosun University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001561198     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1314879     Document Type: Article

References (11)

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