Silicon Three-Axial Tactile Force Sensor;Taktiler Dreikomponenten-Kraftsensor

Technisches Messen

Volumn 66, Issue 5, 1999, Pages 185-190

  Bütefisch, Sebastian ^a   Büttgenbach, Stephanus ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADVANCED DESIGNS; FEM SIMULATIONS; MICROMECHANICAL CANTILEVERS; MICROMECHANICAL STRUCTURES; REFERENCE SENSORS; SENSING ELEMENTS; SILICON MICROMACHINING TECHNOLOGY; SPRING CONSTANTS;

DESIGN; ELECTROMECHANICAL DEVICES; NANOCANTILEVERS; SILICON;

SENSORS;

EID: 0042736003     PISSN: 01718096     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. Roßberg, R.: Mikrodosierung für portable Flüssigkeitssysteme, Dissertation, Shaker Verlag, Aachen 1994.
2. Büttgenbach, S.: Mikromechanik, Einführung in Technologie und Anwendung. 2. Auflage, Teubner Verlag, Stuttgart 1990.
3. Beebe, D. J.: A silicon force sensor for robotics and medicine, Sensors and Actuators A, 50 (1995) p. 55.
4. Clark, S. K. and Wise, K. D.: Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors, IEEE Trans. Electron Devices, ED-26 (1979) p. 1887.
5. Dauer, S., Büttgenbach, S. and Ehlert, A.: Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling, Proc. Eurosensors XII, Southampton, 1998, pp. 7-10.
6. Wogersien, A., Dauer, S. and Büttgenbach, S.: Fabrication of thin film resistors and silicon microstructures using a frequency doubled Nd:YAG-laser, Proc. Symp. on Design, Test, and Microfabrication of MEMS/MOEMS, Paris, 1999, in print