Thermal stability of the electrical isolation in n-type gallium arsenide layers irradiated with H, He, and B ions

Journal of Applied Physics

Volumn 81, Issue 2, 1997, Pages 650-655

  De Souza, J P ^a   Danilov, I ^a   Boudinov, H ^a  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001475990     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364229     Document Type: Article

References (18)

1. S. J. Pearton, Mater. Sci. Rep. 4, 313 (1990).
2. L. Salmon, J. Mat. Sci. Electron. 3, 263 (1992).
3. D. C. D'Avanzo, IEEE Trans. Electron Devices ED-29, 1051 (1982).
4. J. P. de Souza and D. K. Sadana, Mater. Res. Soc. Symp. Proc. 240, 887 (1992).
5. Y. Kato, T. Shimada, Y. Shiraki, and K. F. Komatsubara, J. Appl. Phys. 45, 1044 (1974).
6. J. P. de Souza, I. Danilov, and H. Boudinov, Appl. Phys. Lett. 68, 535 (1996).
7. R. L. Van Tuyl, V. Kumar, D. C. D'Avanzo, T. W. Taylor, V. E. Peterson, D. P. Hornbuckle, R. A. Fisher, and D. B. Estreich, IEEE Trans. Electron Devices ED-29, 1031 (1982).
8. F. Clauwaert, P. Van Daele, R. Baets, and P. Lagasse, J. Electrochem. Soc. 134, 711 (1987).
9. F. Ren, S. J. Pearton, W. S. Hobson, T. R. Fullowan, J. Lothian, and A. W. Yanof. Appl. Phys. Lett. 56, 860 (1990).
10. S. J. Pearton, C. R. Abernathy, J. W. Lee, F. Ren, and C. S. Wu, J. Vac. Sci. Technol. B 13, 15 (1995).
11. R. T. Blunt, in Solid State Devices 1985, edited by P. Balk and O. G. Folberth (Elsevier, the Netherlands, 1996), p. 133.
12. L. J. Van der Pauw, Philips Res. Rep. 13, 1 (1959).
13. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, Oxford, 1985), Vol. 1.
14. D. Pons, A. Mircea, and J. Bourgoin, J. Appl. Phys. 51, 4150 (1980).
15. W. J. Moore, R. L. Hawkins, and B. V. Shanabrook, Physica B & C B146, 65 (1987).
16. J. C. Bourgoin, H. J. von Bardeleben, and D. Stievenard, J. Appl. Phys. 64, R65 (1988).
17. R. Wörner, U. Kaufman, and J. Schneider, Appl. Phys. Lett. 40, 141 (1982).
18. G. M. Martin, P. Secordel, and C. Venger, J. Appl. Phys. 53, 8706 (1982).