High-performance beamline for vacuum-ultraviolet-excited material processing

Review of Scientific Instruments

Volumn 69, Issue 1, 1998, Pages 265-269

  Akazawa, H ^a   Takahashi, J ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001443962     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148507     Document Type: Article

References (10)

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2. For recent activities, see the reviews in the J. Jpn. Soc. Synchrotron Radiat. Res. 8 (1995) (entire issue).
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5. K. Yamada, T. Kaneko, K. Kuroda, M. Nakajima, and T. Hosokawa, Nucl. Instrum. Methods Phys. Res. B 119, 119 (1996).
6. H. Akazawa and Y. Utsumi, J. Appl. Phys. 78, 2725 (1995).
7. H. Akazawa, M. Nagase, and Y. Ustumi, Nucl. Instrum. Methods Phys. Res. B 91, 644 (1994).
8. H. Akazawa, Phys. Rev. B 52, 12 386 (1995).
9. H. Akazawa and Y. Utsumi, J. Appl. Phys. 78, 2740 (1995).
10. B. Drevillon, J. Perrin, R. Marbot, A. Violet, and J. L. Dalby, Rev. Sci. Instrum. 53, 969 (1982).