Surfactant-mediated MBE growth of β-SiC on Si substrates

Materials Science and Engineering B

Volumn 61-62, Issue , 1999, Pages 559-562

  Zekentes, K ^a   Tsagaraki, K ^a  

^a Foundation of Research Technology   (Greece)

Author keywords

Heteroepitaxy; Molecular beam epitaxy; Surfactant; SiC

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; MOLECULAR BEAM EPITAXY; SEMICONDUCTING GERMANIUM; SEMICONDUCTOR GROWTH; SILICON CARBIDE; SILICON WAFERS; SURFACE ACTIVE AGENTS;

HETEROEPITAXY;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0001423949     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00473-5     Document Type: Article

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