Alpha-elastic recoil detection analysis of the energy distribution of oxygen ions implanted into silicon with plasma immersion ion implantation

Journal of Applied Physics

Volumn 81, Issue 10, 1997, Pages 6642-6650

  Barradas, N P ^a,d   Maas, A J H ^b   Mandl S ^c   Gunzel R ^c  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^d CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001402621     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365203     Document Type: Article

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