Mechanical properties of nanocrystalline and epitaxial TiN films on (100) silicon

Journal of Materials Research

Volumn 16, Issue 9, 2001, Pages 2733-2738

  Wang, H ^a   Sharma, A ^a   Kvit, A ^a   Wei, Q ^b   Zhang, X ^a   Koch, C C ^a   Narayan, J ^a  

^a North Carolina State University   (United States)

^b NORTH CAROLINA A AND T STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001402301     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.2001.0373     Document Type: Article

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