RBS as a tool for topographic modelling of polycrystalline thin film interactions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 136-138, Issue , 1998, Pages 241-246

  Baglin, J E E ^a   Tabacniks, M H ^b   Kellock, A J ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

Interdiffusion; Morphology; RBS; Thin films; Topography

Indexed keywords

GOLD ALLOYS; GRAIN BOUNDARIES; INTERDIFFUSION (SOLIDS); MORPHOLOGY; POLYCRYSTALLINE MATERIALS; REACTION KINETICS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILVER ALLOYS; TANTALUM ALLOYS; THERMAL DIFFUSION IN SOLIDS; THERMODYNAMIC STABILITY; THIN FILMS;

TOPOGRAPHY;

METALLIC FILMS;

EID: 0032017221     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00685-X     Document Type: Article

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