Modification of an NF3 film by sub-excitation electrons

Chemical Physics Letters

Volumn 341, Issue 5-6, 2001, Pages 401-406

  Tegeder, Petra ^a   Illenberger, Eugen ^a  

^a FREIE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001337275     PISSN: 00092614     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0009-2614(01)00517-6     Document Type: Article

References (27)

1. M.B. Robin, Higher Excited States of Polyatomic Molecules, vol. 1, Academic Press, New York, 1974, p. 209.
2. Bruno G., Capezzuto P., Cicala G., Manodoro P. J. Vac. Sci. Technol. 12:1994;690.
3. Greenberg K.E., Verdeyen J.T. J. Appl. Phys. 57:1985;1596.
4. Perrin J., Méot J., Siéfert J.M., Schmitt J. Plasma Chem. Plasma Processing. 10:1990;571.
5. Manos D.M., Flamm D.L. Plasma Etching. 1989;Academic Press, Boston.
6. P.J. Chantry, in: H.S.W. Massey, E.W. McDaniel, B. Bederson (Eds.), Applied Atomic Collision Physics, vol. 3, Academic Press, New York, 1982.
7. Shaw M.J., Jones J.D.J. Appl. Phys. 14:1977;393.
8. Pellerite M.J., Brauman J.I. J. Am. Chem. Soc. 105:1983;2672.
9. Langer J., Matejcik S., Illenberger E. Phys. Chem. Chem. Phys. 2:2000;1001.
10. Nandi D., Rangwala S.A., Kumar S.V.K., Krishnakumar E. Int. J. Mass Spectrom. 205:2001;111.
11. Hunter S.R., Christophorou L.G. J. Chem. Phys. 80:1984;6150.
12. Weik F., Illenberger E. J. Chem. Phys. 103:1955;1406.
13. Ruckhaberle N., Lehmann L., Matejcik S., Illenberger E., Bouteiller Y., Periquet V., Museur L., Desfrançois C., Schermann J.P. J. Phys. Chem. 101:1997;9942.
14. Tegeder P., Illenberger E. Phys. Chem. Chem. Phys. 1:1999;5197.
15. Lacombe S., Cemic F., Jacobi K. Phys. Rev. Lett. 79:1997;1146.
16. Martel R., Rochefort A., McBreen P.H. J. Am. Chem. Soc. 116:1994;5965.
17. Olsen C., Rowntree P.A. J. Chem. Phys. 108:1998;3750.
18. Bodaïffa B., Cloutier P., Hunting D., Huels M.A., Sanche L. Science. 287:2000;1658.
19. P. Tegeder, Doctoral Thesis, Freie Universität Berlin, 1999.
20. B.E. Hayden, in: J.T. Yates Jr., Th.E. Madey (Eds.), Vibrational Spectroscopy of Molecules at Surfaces, Plenum Press, New York, 1987.
21. T. Shimanouchi, Tables of Molecular Vibrational Frequencies Consolidated, vol. 1, NSRDS-NBS 39, Washington, 1972.
22. Gilbert M., Nectoux P., Drifford M. J. Chem. Phys. 68:1978;679.
23. Sanche L. J. Phys. B. 23:1990;1597.
24. Schmidt W.F. Liquid State Electronics of Insulating Liquids. 1997;CRC Press, Boca Raton.
25. Olsen C.O., Rowntree P.A. J. Chem. Phys. 108:1998;3750.
26. Boesten L., Tachibana Y., Nakano Y., Shinohara S., Tanaka H., Dillon M.A. J. Phys. B. 29:1996;5475.
27. Gadzuk J.W., Richter L.J., Buntin S.A., King D.S., Cavanagh R.R. Surf. Sci. 235:1990;317.