Two-dimensional hydrogen analysis on solid surfaces by time-of-flight electron-stimulated desorption microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 7 B, 2000, Pages 4363-4365

  Ueda, Kazuyuki ^a   Ogai, Keiko ^a   Ishikawa, Ken'ichi ^a   Yoshimura, Masamichi ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Desorption; ESD; Hydrogen; Scanning; TOF; Two dimensional

Indexed keywords

DESORPTION; ELECTRON GUNS; ISOTOPES; PHOTOLITHOGRAPHY; RADIATION DAMAGE; SCANNING; SCANNING ELECTRON MICROSCOPY; SILICON; SURFACE STRUCTURE;

ELECTRON-STIMULATED DESORPTION (ESD); HYDROGEN TERMINATED SURFACES; TIME-OF-FLIGHT (TOF) METHODS;

HYDROGEN;

EID: 0001332002     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.4363     Document Type: Article

References (5)

1. K. Ishikawa, M. Yoshimura, K. Ueda and Y. Sakai: Rev. Sci. Instrum. 68 (1997) 4103.
2. K. Ueda, K. Ishikawa and M. Yoshimura: Jpn. J. Appl. Phys. 36 (1997) L1254.
3. K. Ishikawa, K. Ueda and M. Yoshimura: Surf. Sci. 433/435 (1999) 244.
4. R. D. Ramsier and J. T. Jates, Jr.: Surf. Sci. Rept. 12 (1991) 243.
5. K. Ueda: J. Cryst. Growth 210 (2000) 416.