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Volumn 36, Issue 9 A/B, 1997, Pages
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Two-dimensional hydrogen analysis by time-of-flight-type electron-stimulated desorption spectroscopy
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Author keywords
ESD; Hydrogen; Scanning image of hydrogen; Silicon oxide; TOF
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Indexed keywords
IMAGING TECHNIQUES;
SILICON COMPOUNDS;
SPECTROSCOPIC ANALYSIS;
SCANNING ELECTRON STIMULATED DESORPTION SPECTROSCOPY (ESD);
SILICON OXIDE;
TWO DIMENSIONAL HYDROGEN ANALYSIS;
HYDROGEN;
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EID: 0031223252
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.36.l1254 Document Type: Article |
Times cited : (11)
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References (16)
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