Cathode fall-dominated Ar discharge: Transient and steady-state experiments

Journal of Applied Physics

Volumn 85, Issue 10, 1999, Pages 7089-7096

  Jelenkovic B M ^a   Phelps, A V ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001294828     PISSN: 00218979     EISSN: 10897550     Source Type: Journal    
DOI: 10.1063/1.370516     Document Type: Article

References (46)

1. M. J. Druyvesteyn and F. M. Penning, Rev. Mod. Phys. RMPHAT 12, 87 (1940)
2. G. Francis, Handb. Sens. Physiol. 23MHAW 22, 53 (1956).
3. Z. Lj. Petrović and A. V. Phelps, Phys. Rev. E PLEEE8 47, 2806 (1993).
4. B. M. Jelenković, K. Ròzsa, and A. V. Phelps, Phys. Rev. E PLEEE8 47, 2816 (1993).
5. Z. Lj. Petrović and A. V. Phelps, Phys. Rev. E PLEEE8 56, 5920 (1997).
6. B. M. Jelenković and A. V. Phelps, Phys. Rev. E PLEEE8 53, 1852 (1996). In Fig. 3(c) of this reference the emission signal from near the cathode is displaced upward one unit, i.e., the signal is essentially zero prior to the application of voltage.
7. A. V. Phelps and Z. Lj. Petrović, Plasma Sources Sci. Technol. (in press).
8. G. F. Weston, Cold Cathode Glow Discharge Tubes (ILIFFE, London, 1968), Chap. 1; B. Chapman, Glow Discharge Processes (Wiley, New York, 1980); M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994), Chap. 1.
9. H. Raether, Electron Avalanches and Breakdown in Gases (Buttersworth, London, 1964).
10. J. Dutton, in Electrical Breakdown of Gases, edited by J. M. Meek and J. D. Graggs (Wiley, Chinchester, 1978), Chap. 3.
11. P. F. Little, Handb. Sens. Physiol. 23MHAW 21, 574 (1956).
12. M. Menes, Phys. Rev. PHRVAO 116, 481 (1959).
13. J. A. Hornbeck, Phys. Rev. PHRVAO 83, 374 (1951).
14. J. P. Molnar, Phys. Rev. PHRVAO 83, 940 (1951).
15. Some early references to these processes in the cathode fall in hydrogen discharges are: G. W. McClure and K. D. Granzow, Phys. Rev. PHRVAO 125, 3 (1962)
16. H. Schlumbohm, Z. Naturforsch. A ZENAAU 22A, 347 (1967)
17. K. N. Ul’yanov, Zh. Tekh. Fiz. ZTEFA3 40, 2138 (1970)
18. K. N. Ul’yanov, [Sov. Phys., Tech. Phys. SPTPA3 15, 1667 (1971)].
19. A. V. Phelps and B. M. Jelenković, Phys. Rev. A PLRAAN 38, 2975 (1988). Earlier suggestions of the importance of heavy particle excitation are discussed in this reference.
20. For a review of such models up to about 1991 see: G. G. Lister, J. Phys. D JPAPBE 25, 1649 (1992)
21. Since publication of this review, numerous models of the cathode region, mostly concerned with He discharges, have appeared. See, for example: W. N. G. Hitchon, G. J. Parker, and J. E. Lawler, IEEE Trans. Plasma Sci. ITPSBD 21, 228 (1993).
22. M. Surendra, D. B. Graves, and G. M. Jellum, Phys. Rev. A PLRAAN 41, 1112 (1990).
23. A. Bogaerts, R. D. Guenard, B. W. Smith, J. D. Winefordner, W. W. Harrison, and R. Gijbels, Spectrochim. Acta B SAASBH 52, 219 (1997)
24. A. Bogaerts and R. Gijbels, J. Appl. Phys. JAPIAU 84, 121 (1998). These papers are from a series modeling various two-dimensional geometries.
25. K. Nanbu and J. Nageyama, Vacuum VACUAV 47, 1031 (1996).
26. J. Sun, Y. Gong, and D. Wang, J. Phys. D JPAPBE 26, 436 (1993).
27. This model used in this paper is a one-dimensional version of that described by J. P. Boeuf, in Physics and Applications of Pseudosparks, edited by M. A. Gunderson and G. Schaefer (Plenum, New York, 1990), 255 and by I. Pérès and L. C. Pitchford, J. Appl. Phys. JAPIAU 78, 774 (1995). The model is known as SIGLO-TR and is obtainable at http://www.sci.net/siglo. We are indebted to L. C. Pitchford for a copy of this code.
28. Tabulations of published steady-state measurements of discharge voltage and current and of cathode fall thickness are available for Ar discharges at http://jilawww.colorado.edu/www/research/colldata.html or ftp:/jila.colorado.edu/collision_data/.
29. B. M. Jelenković and A. V. Phelps, Phys. Rev. A PLRAAN 36, 5310 (1987).
30. R. Drieskemper, G. Schröder, and W. Bötticher, IEEE Trans. Plasma Sci. ITPSBD 23, 180 (1995).
31. G. Simon and W. Bötticher, J. Appl. Phys. JAPIAU 76, 5036 (1994).
32. E. J. Sternglass, Phys. Rev. PHRVAO 95, 345 (1954).
33. A. V. Phelps, Z. Lj. Petrović, and B. M. Jelenković, Phys. Rev. E PLEEE8 47, 2825 (1993).
34. C. E. Moore, Atomic Energy Levels, National Bureau of Standards Circular 467 (U. S. Government, Washington, 1949), Vol. 1, p. 211.
35. I. Stefanović and Z. Lj. Petrović, Jpn. J. Appl. Phys., Part 1 JAPNDE 36, 4728 (1997).
36. Z. M. Jelenak, Z. B. Velikić, J. V. Božin, Z. Lj. Petrović, and B. M. Jelenković, Phys. Rev. E PLEEE8 47, 3566 (1993)
37. J. V. Božin, Z. M. Jelenak, Z. B. Velikić, I. D. Belća, Z. Lj. Petrović, and B. M. Jelenković, Phys. Rev. E 53, 4007 (1996).
38. R. S. F. Chang and D. W. Setser, J. Chem. Phys. JCPSA6 69, 3885 (1982)
39. G. Inoue, D. W. Setser, and N. Sadeghi, J. Chem. Phys. 76, 977 (1982)
40. T. D. Nguyen and N. Sadeghi, Phys. Rev. A PLRAAN 18, 1388 (1978).
41. A. V. Phelps and L. C. Pitchford, Phys. Rev. A PLRAAN 31, 2932 (1985). Compilations of the data used for electron collisions with Ar and [formula omitted] are available at the website given in Ref. 22.
42. D. A. Scott and A. V. Phelps, Phys. Rev. A PLRAAN 43, 3043 (1991).
43. Z. Lj. Petrović, B. M. Jelenković, and A. V. Phelps, Phys. Rev. Lett. PRLTAO 68, 325 (1992).
44. K. Rózsa, A. Gallagher, and Z. Donkó, Phys. Rev. E PLEEE8 52, 913 (1995).
45. A. V. Phelps, J. Phys. Chem. Ref. Data JPCRBU 20, 557 (1991).
46. A. L. Ward, J. Appl. Phys. JAPIAU 33, 2789 (1962). Except for one point, the values of [formula omitted] attributed to Ward are based on unpublished calculations using Ward's electron ionization coefficients and ion mobilities in the code cited in Ref. 21. The calculated discharge voltages versus [formula omitted] agree well with Ward's values. Note that the calculated voltages are quite sensitive to the choices of ionization coefficients, ion mobilities, and electron yield per ion [formula omitted]