Quantitation of latent resist images using photon tunneling microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3651-3654

  Liddle, J A ^a   Johnson, J A ^b   Cirelli, R ^a   Mkrtchyan, M M ^a   Novembre, A E ^a   Peabody, M L ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001238866     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590384     Document Type: Article

References (12)

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