Instrument for the in situ measurement of depositing particles

Review of Scientific Instruments

Volumn 68, Issue 8, 1997, Pages 3161-3167

  Tsuchiya, Masayoshi ^a   Takami, Katsumi ^a  

^a SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001195998     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148285     Document Type: Article

References (20)

1. K. Tsuzuki and T. Iino, Inst. Mech Eng. C507, 61 (1988).
2. S. D. Chen and D. A. Hope, 34th Proc. IES (1988), pp. 524-531.
3. K. Takami, Jpn. J. Tribol. 37, 277 (1992).
4. F. Tardif, H. Paris, and J. Daval, Microcontamination April (1990), p. 21; B. J. Tullis, ibid. Nov. (1985), p.67.
5. F. Tardif, H. Paris, and J. Daval, Microcontamination April (1990), p. 21; B. J. Tullis, ibid. Nov. (1985), p.67.
6. P. Borden, Microcontamination Jan. (1990), p. 21; ibid. Feb. (1990), p. 23.
7. P. Borden, Microcontamination Jan. (1990), p. 21; ibid. Feb. (1990), p. 23.
8. R. P. Donovan, A. C. Clayton, and D. S. Ensor, 1987 Proc. IES (1987), pp. 473-482.
9. K. Takami, Proc. 11th Int. Confederation of Contamination Control Societies (Sept. 21-25, 1992, London), pp. 333-338.
10. K. Takami, Mater. Sci. Eng. B 44, 181 (1997).
11. H. An, Y. Mori, T. Kataoka, K. Endo, K. Inagaki, K. Yamaura, K. Yamauchi, and T. Fukuike, Int. J. Jpn. Soc. Prec. Eng. 28, 356 (1994).
12. K. Takami, T. Yachi, I. Hourai, and Y. Yatsugake, J. Aerosol Sci. 20, 457 (1989).
13. H. C. van de Hulst, Light Scattering by Small Particles (Dover, New York, 1981), pp. 114-130.
14. F. W. Gallagher III and F. V. Brock, Rev. Sci. Instrum. 67, 403 (1996).
15. J. A. Ogilvy, Theory of Wave Scattering from Random Rough Surfaces (Hilger, New York, 1991), pp. 150-151.
16. J. C. Stover, Optical Scattering, Measurement and Analysis (McGraw-Hill, New York, 1990), pp. 171-179.
17. K. Moriya, K. Hirai, K. Kashima, and S. Takasu, J. Appl. Phys. 66, 5267 (1989).
18. C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, New York, 1983), pp. 403-406.
19. B. Y. H. Liu, S. Chae, and G. Bae, J. Electrochem. Soc. 140, 1403 (1993).
20. S. Chae, H. Lee, and B. Y. H. Liu, 1992 Proc. IES (1992). pp.271-279.