Defect inspection of wafers by laser scattering

Materials Science and Engineering B

Volumn 44, Issue 1-3, 1997, Pages 181-187

  Takami, Katsumi ^a  

^a SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Defect detection; Elastic light scattering; Semiconductor wafers

Indexed keywords

LASER APPLICATIONS; LIGHT SCATTERING; SURFACE ROUGHNESS;

ELASTIC LIGHT SCATTERING; INFRARED TOMOGRAPHY SYSTEMS; LASER SURFACE SCANNERS; WAFER DEFECT INSPECTION;

CRYSTAL DEFECTS;

EID: 0008909441     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01745-X     Document Type: Article

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