Fabrication of a varied-line-spacing plane grating with aspheric wavefront holographic recording for a new grazing incidence monochromator at the Photon Factory

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3150, Issue , 1997, Pages 171-182

  Amemiya, Kenta ^a   Kitajima, Yoshinori ^b   Yonamoto, Yoshiki ^a   Ohta, Toshiaki ^a   Ito, Kenji ^b   Sano, Kazuo ^c   Nagano, Tetsuya ^c   Koeda, Masaru ^c   Sasai, Hiroyuki ^c   Harada, Yoshihisa ^c  

^a UNIVERSITY OF TOKYO   (Japan)

^b INSTITUTE OF MATERIALS STRUCTURE SCIENCE   (Japan)

^c SHIMADZU CORPORATION   (Japan)

Author keywords

Aspheric wavefront recording; Grazing incidence monochromator; Holographic grating; Soft x rays; Varied line spacing

Indexed keywords

ASPHERICS; ELECTROMAGNETIC WAVES; HOLOGRAPHIC GRATINGS; MAGNETIC RECORDING; MONOCHROMATORS; OPTICAL RESOLVING POWER; OPTICAL SYSTEMS; PHOTONS; SUN; SYNCHROTRON RADIATION; SYNCHROTRONS; X RAY LITHOGRAPHY;

ASPHERIC WAVEFRONT RECORDING; GRAZING INCIDENCE MONOCHROMATOR; HOLOGRAPHIC GRATING; SOFT X-RAYS; VARIED LINE SPACING;

WAVEFRONTS;

EID: 0001154807     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.279370     Document Type: Conference Paper

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