Electrically active and inactive b lattice sites in ultrahighly b doped si(001): An x-ray near-edge absorption fine-structure and high-resolution diffraction study

Physical Review Letters

Volumn 82, Issue 22, 1999, Pages 4464-4467

  Vailionis, A ^a   Glass, G ^a   Desjardins, P ^a   Cahill, David G ^a   Greene, J E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001107838     PISSN: 00319007     EISSN: 10797114     Source Type: Journal    
DOI: 10.1103/PhysRevLett.82.4464     Document Type: Article

References (18)

1. Z. Matutinovickrstelj, V. Venkataraman, E. J. Prinz, J. C. Sturm and C. W. Magee, IEEE Trans. Electron Devices, 43, 457, (1996).
2. P. A. Stolk, H.-J. Gossmann, D. J. Eaglesham and J. M. Poate, Nucl. Instrum. Methods Phys. Res., Sect. B, 96, 187, (1995).
3. G. Glass, H. Kim, P. Desjardins, N. Taylor, T. Spila, Q. Lu and J. E. Greene (unpublished).
4. H. Kim, G. Glass, T. Spila, N. Taylor, S. Y. Park, J. R. Abelson and J. E. Greene, J. Appl. Phys., 82, 2288, (1997);
5. G. Glass, H. Kim, M. R. Sardela, Q. Lu, J. R. A. Carlsson, J. R. Abelson and J. E. Greene, Surf. Sci., 392, L63, (1997)
6. O. Madelung and M. Schulz, Landolt-Börnstein, New Series, Group III, Vol. 22, Pt. a (Springer-Verlag, Berlin), (1989).
7. P. Ostoja, D. Nobili, A. Armigliato and R. Angelucci, J. Electrochem. Soc., 123, 124, (1976).
8. F. N. Schwettmann, J. Appl. Phys., 45, 1918, (1974).
9. E. Tarnow, J. Phys. Condens. Matter, 4, 5405, (1992).
10. J. Zhu, T. Diaz de la Rubia, L. H. Yang, C. Mailhiot and G. H. Gilmer, Phys. Rev. B, 54, 4741, (1996).
11. W. H. E. Schwarz, L. Mensching, K. H. Hallmeier and R. Szargan, Chem. Phys., 82, 57, (1983).
12. L. J. Terminello, A. Chaiken, D. A. Lapiano-Smith, D. L. Doll and T. Sato, J. Vac. Sci. Technol. A, 12, 2462, (1994).
13. J. Stöhr, NEXAFS Spectroscopy, Springer Series in Surface Science Vol. 25 Springer, New York, (1996), and references therein.
14. H. S. Bennett, J. Appl. Phys., 59, 2837, (1986).
15. J. R. Klauder, Ann. Phys., 14, 43, (1961).
16. M. Kasrai, Z. Yin, G. M. Bancroft and K. H. Tan, J. Vac. Sci. Technol. A, 11, 2694, (1993).
17. M. W. Ruckman, M. F. Murray, J. K. Mowlem and D. R. Strongin, J. Vac. Sci. Technol. A, 11, 2477, (1993).
18. Y. Wang, R. J. Hamers and E. Kaxiras, Phys. Rev. Lett., 74, 403, (1995).