Hydrogen migration in diamond-like carbon films

Journal of Applied Physics

Volumn 82, Issue 8, 1997, Pages 3791-3796

  Vainonen, E ^a   Likonen, J ^a,c   Ahlgren, T ^a   Haussalo, P ^a   Keinonen, J ^a   Wu, C H ^b  

^a UNIVERSITY OF HELSINKI   (Finland)

^b MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^c VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001072663     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365741     Document Type: Article

References (25)

1. H. Atsumi, S. Tokura, and M. Miyake, J. Nucl. Mater. 155-157, 241 (1988).
2. W. R. Wampler, B. L. Doyle, R. A. Causey, and K. L. Wilson, J. Nucl. Mater. 176,177, 983 (1990).
3. J. W. Davis and A. A. Haasz, J. Nucl. Mater. 183, 229 (1991).
4. S. Chiu and A. A. Haasz, J. Nucl. Mater. 196-198, 972 (1992).
5. Y. Muto and K. Morita, J. Nucl. Mater. 223, 262 (1995).
6. D. K. Avasthi, Vacuum 47, 1249 (1996).
7. T. Sharda, D. S. Mirsa, and D. K. Avasthi, Vacuum 47, 1259 (1996).
8. M. Malhotra, T. Som, V. N. Kulkarni, and S. Kumar, Vacuum 47, 1265 (1996).
9. D. C. Ingram, J. C. Keay, and C. Tang, Diam. Relat. Mater. 2, 1414 (1993).
10. G. Popovici, R. G. Wilson, T. Sung, M. A. Prelas, and S. Khasawinah, J. Appl. Phys. 77, 5103 (1995).
11. Manufacturer's statements.
12. A. Anttila, J. Räisänen, and R. Lappalainen. Nucl. Instrum. Methods Phys. Res. B 12, 245 (1985).
13. P. Aarnio, M. Nikkinen, and J. Routti, Sampo90, Logion Oy, Helsinki (1990).
14. T. P. Thinh and J. Leroux, X-ray Spectr. 8, 85 (1979).
15. J. Saarilahti and E. Rauhala, Nucl. Instrum. Methods Phys. Res. B 64, 734 (1992).
16. H. S. Whitlow, J. Keinonen, M. Hautala, and A. Hautojärvi, Nucl. Instrum. Methods Phys. Res. B 5, 505 (1984).
17. P. Torri, J. Keinonen, and K. Nordlund, Nucl. Instrum. Methods Phys. Res. B 84, 105 (1994).
18. P. Haussalo, J. Keinonen. U.-M. Jäske, and J. Sievinen, J. Appl. Phys. 75, 7770 (1994).
19. M. Hakovirta, J. Salo, R. Lappalainen, and A. Anttila, Phys. Lett. A 205, 287 (1995).
20. J. F. Ziegler, J. P. Biersack, and U. Littmark, in The Stopping and Range of Ions in Solids edited by J. F. Ziegler (Pergamon, New York, 1985), Vol. 1; J. F. Ziegler and J. P. Biersack. TRIM-95 computer code (private communication).
21. R. G. Wilson, F. A. Stevie, and C. W. Magee, in Secondary Ion Mass Spectrometry A Practical Handbook for Depth Profiling (Wiley, New York, 1989), pp. 2.3-2, 3.1-1.
22. K. Morita, K. Ohtsuka, and Y. Hasebe, J. Nucl. Mater. 162-164, 990 (1989).
23. M. Saeki, J. Nucl. Mater. 131, 32 (1985).
24. R. A. Causey, M. I. Baskes, and K. Wilson, J. Vac. Sci. Technol. A 4, 1189 (1986).
25. S. P. Mehandru, A. B. Anderson, and J. C. Angus, J. Mater. Res. 7, 689 (1992).