Studies of metallic species and oxygen incorporation during sputter-deposition of SrBi2Ta2O9 films, using mass spectroscopy of recoiled ions

Applied Physics Letters

Volumn 72, Issue 20, 1998, Pages 2529-2531

  Im, J ^a   Krauss, A R ^a   Dhote, A M ^a   Gruen, D M ^a   Auciello, O ^a   Ramesh, R ^b   Chang, R P H ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c Northwestern University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001053211     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121409     Document Type: Article

References (9)

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