-
3
-
-
0029332352
-
-
T. J. Licata, E. G. Colgan, J. M. E. Harper, and S. E. Luce, IBM J. Res. Dev. 34, 419 (1995).
-
(1995)
IBM J. Res. Dev.
, vol.34
, pp. 419
-
-
Licata, T.J.1
Colgan, E.G.2
Harper, J.M.E.3
Luce, S.E.4
-
6
-
-
0029326048
-
-
H. H. Lee, Fundamentals of Microelectronics Processing (McGraw-Hill, New York, 1990); J.-H. Yun and S.-K. Park, Jpn. J. Appl. Phys. 34, 3216 (1995).
-
(1995)
Jpn. J. Appl. Phys.
, vol.34
, pp. 3216
-
-
Yun, J.-H.1
Park, S.-K.2
-
8
-
-
0000289307
-
-
M. G. Simmonds, E. C. Phillips, J. W. Hwang, and W. L. Gladfelter, Chemtronics 5, 155 (1991).
-
(1991)
Chemtronics
, vol.5
, pp. 155
-
-
Simmonds, M.G.1
Phillips, E.C.2
Hwang, J.W.3
Gladfelter, W.L.4
-
10
-
-
0042356768
-
-
Y. Fan, I. Karpov, G. Bratina, L. Sorba, W. Gladfelter, and A. Franciosi, J. Vac. Sci. Technol. B 14, 623 (1996); I. Karpov, N. Venkateswaran, G. Bratina, W. Gladfelter, A. Franciosi, and L. Sorba, ibid. 13, 2041 (1995).
-
(1996)
J. Vac. Sci. Technol. B
, vol.14
, pp. 623
-
-
Fan, Y.1
Karpov, I.2
Bratina, G.3
Sorba, L.4
Gladfelter, W.5
Franciosi, A.6
-
11
-
-
0029369422
-
-
Y. Fan, I. Karpov, G. Bratina, L. Sorba, W. Gladfelter, and A. Franciosi, J. Vac. Sci. Technol. B 14, 623 (1996); I. Karpov, N. Venkateswaran, G. Bratina, W. Gladfelter, A. Franciosi, and L. Sorba, ibid. 13, 2041 (1995).
-
(1995)
J. Vac. Sci. Technol. B
, vol.13
, pp. 2041
-
-
Karpov, I.1
Venkateswaran, N.2
Bratina, G.3
Gladfelter, W.4
Franciosi, A.5
Sorba, L.6
-
12
-
-
0007820334
-
-
N. Venkateswaran, I. Karpov, W. Gladfelter, and A. Franciosi, J. Vac. Sci. Technol. A 14, 1949 (1996); I. Karpov, G. Bratina, L. Sorba, A. Franciosi, M. G. Simmonds and W. L. Gladfelter, J. Appl. Phys. 76, 3471 (1994).
-
(1996)
J. Vac. Sci. Technol. A
, vol.14
, pp. 1949
-
-
Venkateswaran, N.1
Karpov, I.2
Gladfelter, W.3
Franciosi, A.4
-
13
-
-
0000727701
-
-
N. Venkateswaran, I. Karpov, W. Gladfelter, and A. Franciosi, J. Vac. Sci. Technol. A 14, 1949 (1996); I. Karpov, G. Bratina, L. Sorba, A. Franciosi, M. G. Simmonds and W. L. Gladfelter, J. Appl. Phys. 76, 3471 (1994).
-
(1994)
J. Appl. Phys.
, vol.76
, pp. 3471
-
-
Karpov, I.1
Bratina, G.2
Sorba, L.3
Franciosi, A.4
Simmonds, M.G.5
Gladfelter, W.L.6
-
14
-
-
0003427458
-
-
Addison-Wesley, Reading, MA
-
B. D. Cullity, Elements of X-ray Diffraction, 2nd ed. (Addison-Wesley, Reading, MA, 1978), p. 297.
-
(1978)
Elements of X-ray Diffraction, 2nd Ed.
, pp. 297
-
-
Cullity, B.D.1
-
15
-
-
0346348766
-
-
J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
-
(1979)
Surf. Sci.
, vol.80
, pp. 550
-
-
Massies, J.1
Etienne, P.2
Linh, N.T.3
-
16
-
-
0347661465
-
-
J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
-
(1982)
J. Cryst. Growth
, vol.60
, pp. 393
-
-
Landgren, G.1
Ludeke, R.2
Serrano, C.3
-
17
-
-
0024482618
-
-
J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
-
(1989)
Philos. Mag. A
, vol.59
, pp. 1
-
-
Kiely, C.J.1
Cherns, D.2
-
18
-
-
0019681863
-
-
J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
-
(1981)
J. Appl. Phys.
, vol.52
, pp. 7317
-
-
Petroff, P.M.1
Feldman, L.C.2
Cho, A.Y.3
Williams, R.4
-
19
-
-
0027906370
-
-
D. Sun, R. Beanland, T. B. F. Joyce, J. V. Armstrong, T. J. Bullough, and P. J. Goodhew, J. Cryst. Growth 132, 592 (1993).
-
(1993)
J. Cryst. Growth
, vol.132
, pp. 592
-
-
Sun, D.1
Beanland, R.2
Joyce, T.B.F.3
Armstrong, J.V.4
Bullough, T.J.5
Goodhew, P.J.6
-
20
-
-
0019681863
-
-
P. N. Petroff, L. C. Feldman, A. Y. Cho, and R. S. Williams, J. Appl. Phys. 52, 7317 (1881); R. Ludeke, and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981); C. J. Kelly and D. Cherns, Philos. Mag. A 59, 1 (1989).
-
(1881)
J. Appl. Phys.
, vol.52
, pp. 7317
-
-
Petroff, P.N.1
Feldman, L.C.2
Cho, A.Y.3
Williams, R.S.4
-
21
-
-
0019613049
-
-
P. N. Petroff, L. C. Feldman, A. Y. Cho, and R. S. Williams, J. Appl. Phys. 52, 7317 (1881); R. Ludeke, and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981); C. J. Kelly and D. Cherns, Philos. Mag. A 59, 1 (1989).
-
(1981)
J. Vac. Sci. Technol.
, vol.19
, pp. 667
-
-
Ludeke, R.1
Landgren, G.2
-
22
-
-
0019681863
-
-
P. N. Petroff, L. C. Feldman, A. Y. Cho, and R. S. Williams, J. Appl. Phys. 52, 7317 (1881); R. Ludeke, and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981); C. J. Kelly and D. Cherns, Philos. Mag. A 59, 1 (1989).
-
(1989)
Philos. Mag. A
, vol.59
, pp. 1
-
-
Kelly, C.J.1
Cherns, D.2
-
23
-
-
5844336152
-
-
P. K. Bhattaacharya, J. E. Oh, J. Singh, D. Biswas, R. Clarke, W. Dos Passos, R. Merlin, N. Mestres, K. H. Chang, and R. Gibala, J. Appl. Phys. 67, 3700 (1990).
-
(1990)
J. Appl. Phys.
, vol.67
, pp. 3700
-
-
Bhattaacharya, P.K.1
Oh, J.E.2
Singh, J.3
Biswas, D.4
Clarke, R.5
Dos Passos, W.6
Merlin, R.7
Mestres, N.8
Chang, K.H.9
Gibala, R.10
-
24
-
-
0347902190
-
-
G. Sberveglieri, V. Canevari, N. Romeo, and C. Spaggiari, Mater. Res. Soc. Symp. Proc. 54, 675 (1986).
-
(1986)
Mater. Res. Soc. Symp. Proc.
, vol.54
, pp. 675
-
-
Sberveglieri, G.1
Canevari, V.2
Romeo, N.3
Spaggiari, C.4
-
25
-
-
0026188071
-
-
R. J. De Angelis, R. J. Jacob, and J. E. Funk, Thin Solid Films 202, 91 (1991); W. L. Gladfelter, D. C. Boyd, and K. F. Jensen, Chem. Mater. 1, 339 (1989).
-
(1991)
Thin Solid Films
, vol.202
, pp. 91
-
-
De Angelis, R.J.1
Jacob, R.J.2
Funk, J.E.3
-
26
-
-
5344238317
-
-
R. J. De Angelis, R. J. Jacob, and J. E. Funk, Thin Solid Films 202, 91 (1991); W. L. Gladfelter, D. C. Boyd, and K. F. Jensen, Chem. Mater. 1, 339 (1989).
-
(1989)
Chem. Mater.
, vol.1
, pp. 339
-
-
Gladfelter, W.L.1
Boyd, D.C.2
Jensen, K.F.3
|