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Volumn 71, Issue 21, 1997, Pages 3090-3092

Microstructure of Al contacts on GaAs

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EID: 0001024838     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120255     Document Type: Article
Times cited : (7)

References (26)
  • 6
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    • H. H. Lee, Fundamentals of Microelectronics Processing (McGraw-Hill, New York, 1990); J.-H. Yun and S.-K. Park, Jpn. J. Appl. Phys. 34, 3216 (1995).
    • (1995) Jpn. J. Appl. Phys. , vol.34 , pp. 3216
    • Yun, J.-H.1    Park, S.-K.2
  • 15
    • 0346348766 scopus 로고
    • J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
    • (1979) Surf. Sci. , vol.80 , pp. 550
    • Massies, J.1    Etienne, P.2    Linh, N.T.3
  • 16
    • 0347661465 scopus 로고
    • J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
    • (1982) J. Cryst. Growth , vol.60 , pp. 393
    • Landgren, G.1    Ludeke, R.2    Serrano, C.3
  • 17
    • 0024482618 scopus 로고
    • J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
    • (1989) Philos. Mag. A , vol.59 , pp. 1
    • Kiely, C.J.1    Cherns, D.2
  • 18
    • 0019681863 scopus 로고
    • J. Massies, P. Etienne, and N. T. Linh, Surf. Sci. 80, 550 (1979); G. Landgren, R. Ludeke, and C. Serrano, J. Cryst. Growth 60, 393 (1982); C. J. Kiely and D. Cherns, Philos. Mag. A 59, 1 (1989); P. M. Petroff, L. C. Feldman, A. Y. Cho, and R. Williams, J. Appl. Phys. 52, 7317 (1981).
    • (1981) J. Appl. Phys. , vol.52 , pp. 7317
    • Petroff, P.M.1    Feldman, L.C.2    Cho, A.Y.3    Williams, R.4
  • 20
    • 0019681863 scopus 로고
    • P. N. Petroff, L. C. Feldman, A. Y. Cho, and R. S. Williams, J. Appl. Phys. 52, 7317 (1881); R. Ludeke, and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981); C. J. Kelly and D. Cherns, Philos. Mag. A 59, 1 (1989).
    • (1881) J. Appl. Phys. , vol.52 , pp. 7317
    • Petroff, P.N.1    Feldman, L.C.2    Cho, A.Y.3    Williams, R.S.4
  • 21
    • 0019613049 scopus 로고
    • P. N. Petroff, L. C. Feldman, A. Y. Cho, and R. S. Williams, J. Appl. Phys. 52, 7317 (1881); R. Ludeke, and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981); C. J. Kelly and D. Cherns, Philos. Mag. A 59, 1 (1989).
    • (1981) J. Vac. Sci. Technol. , vol.19 , pp. 667
    • Ludeke, R.1    Landgren, G.2
  • 22
    • 0019681863 scopus 로고
    • P. N. Petroff, L. C. Feldman, A. Y. Cho, and R. S. Williams, J. Appl. Phys. 52, 7317 (1881); R. Ludeke, and G. Landgren, J. Vac. Sci. Technol. 19, 667 (1981); C. J. Kelly and D. Cherns, Philos. Mag. A 59, 1 (1989).
    • (1989) Philos. Mag. A , vol.59 , pp. 1
    • Kelly, C.J.1    Cherns, D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.