Silicon micromachined ultrasonic micro-cutter

Proceedings of the IEEE Ultrasonics Symposium

Volumn 3, Issue , 1994, Pages 1907-1911

  Lal, Amit ^a   White, Richard M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC PROPERTIES; ANISOTROPY; BIOMEDICAL EQUIPMENT; ETCHING; MECHANICAL PROPERTIES; MICROMACHINING; SILICON; ULTRASONIC APPLICATIONS;

HUMAN EYE CATARACTOUS LENS; ULTRASONIC DISPLACEMENT; ULTRASONIC MICROCUTTER;

ULTRASONIC DEVICES;

EID: 0028740133     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)