Transport of negatively charged particles by E × B drift in silane plasmas

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1351-1358

  Maemura, Y ^a   Yang, S C ^a   Fujiyama, H ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

Drift velocity; E B drift; Large area amorphouse silicon thin film; Magnetized plasma CVD; Particle transport

Indexed keywords

EID: 0000891781     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00381-2     Document Type: Article

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