Mechanism of particle transport in magnetized silane plasmas

Plasma Sources Science and Technology

Volumn 5, Issue 2, 1996, Pages 333-338

  Yang, S C ^a   Nakajima, Y ^a   Maemura, Y ^a   Matsuda, Y ^a   Fujiyama, H ^a  

^a NAGASAKI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELEMENTARY PARTICLE SOURCES; MAGNETIC FIELD EFFECTS; MAGNETOPLASMA; SILANES; TRANSPORT PROPERTIES;

MAGNETIZED SILANE PLASMAS; PARTICLE TRANSPORT;

PLASMA SOURCES;

EID: 0030134323     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/5/2/032     Document Type: Article

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