IN-SITU OBSERVATION AND FORMATION MECHANISM OF ALUMINUM VOIDING.

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1988, Pages 34-38

  Sugano, Y ^a   Minegishi, S ^a   Sumi, H ^a   Itabashi, M ^a  

^a SONY CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM AND ALLOYS - THERMAL EFFECTS;

ALUMINUM VOIDING; FORMATION MECHANISM; IN SITU OBSERVATION;

SEMICONDUCTOR DEVICES;

EID: 0023843851     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/irps.1988.362197     Document Type: Conference Paper

References (10)