Relation between gas phase CN radical distributions, nitrogen incorporation, and growth rate in flame deposition of diamond

Journal of Applied Physics

Volumn 88, Issue 6, 2000, Pages 3708-3716

  Stolk, R L ^a   Van Herpen, M M J W ^a   Ter Meulen, J J ^a   Schermer, J J ^a  

^a RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000796910     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1287409     Document Type: Article

References (36)

1. S. Jin and T. D. Moustakas, Appl. Phys. Lett. 65, 403 (1994).
2. R. Locher, C. Wild, N. Herres, D. Behr, and P. Koidl, Appl. Phys. Lett. 65, 34 (1994).
3. S. Bohr, R. Haubner, and B. Lux, Diamond Relat. Mater. 4, 133 (1995).
4. W. Muller-Sebert, E. Wörner, F. Fuchs, C. Wild, and P. Koidl, Appl. Phys. Lett. 68, 759 (1996).
5. J. Asmussen, J. Mossbrucker, S. Khatami, W. S. Huang, B. Wright, and V. Ayres, Diamond Relat. Mater. 8, 220 (1999).
6. B. Atakan, M. Beuger, and K. Kohse-Hoinghaus, Phys. Chem. Chem. Phys. 1, 705 (1999).
7. J. J. Schermer and F. K. de Theije, Diamond Relat. Mater. 8, 2127 (1999).
8. G. Z. Cao, J. J. Schermer, W. J. P. van Enckevort, W. A. L. M. Elst, and L. J. Giling, J. Appl. Phys. 79, 1357 (1996).
9. S. Bohr, R. Haubner, and B. Lux, Appl. Phys. Lett. 68, 1075 (1996).
10. A. Badzian, T. Badzian, and S.-T. Lee, Appl. Phys. Lett. 62, 3432 (1993).
11. J. E. Butler, private communication.
12. J. E. Butler, presented at the 6th International Conference on New Diamond Science & Technology, Pretoria, South Africa, 31 August-4 September 1998.
13. R. J. H. Klein-Douwel, J. J. Shermer, and J. J. ter Meulen, Diamond Relat. Mater. 7, 1118 (1998).
14. T. Vandevelde, M. Nesladek, C. Quaeyhaegens, and L. M. Stals, Thin Solid Films 290-291, 143 (1996).
15. M. D. Welter and K. L. Menningen, J. Appl. Phys. 82, 1900 (1997).
16. A. T. Collins, Diamond Relat. Mater. 1, 457 (1992).
17. J. J. Schermer, J. E. M. Hogenkamp, G. C. J. Otter, G. Janssen, W. J. P. van Enckevort, and L. J. Giling, Diamond Relat. Mater. 2, 1149 (1993).
18. R. J. H. Klein-Douwel, J. J. L. Spaanjaars, and J. J. ter Meulen, J. Appl. Phys. 78, 2086 (1995).
19. A. Hirano and M. Tsujishita. Appl. Opt. 33, 7777 (1994).
20. G. Davis, in The Properties of Diamond, edited by J. E. Field (Academic, London, 1979), p. 65.
21. J. Luque and D. R. Crossley, "LIFBASE: Database and Spectral Simulation Program (Version 1.5)," SRI International Report MP 99-009 (1999).
22. J. J. Schermer, W. A. L. M. Elst, and L. J. Giling, Diamond Relat. Mater. 4, 1113 (1995).
23. R. L. Stolk and J. J. ter Meulen, Diamond Relat. Mater. 8, 1251 (1999).
24. P. J. Dean, Phys. Rev. 139, A588 (1965).
25. R. J. Graham, T. D. Moustakas, and M. M. Disko, J. Appl. Phys. 69, 3212 (1991).
26. J. Ruan, W. J. Choyke, and W. D. Partlow, J. Appl. Phys. 69, 6632 (1991).
27. L. Pereira, E. Pereira, A. Cremades, and J. Piqueras, Diamond Relat. Mater. 5, 1189 (1996).
28. V. S. Vavilov, A. A. Gippius, A. M. Zaitsev, B. V. Deryagin, B. V. Spitsyn, and A. E. Aleksenko, Sov. Phys. Semicond. 14, 1078 (1980).
29. L. H. Robins, L. P. Cook, E. N. Farabaugh, and A. Feldman, Phys. Rev. B 39, 13367 (1989).
30. L. Bergman, B. R. Stoner, K. F. Turner, J. T. Glass, and R. J. Nemanich, J. Appl. Phys. 73, 3951 (1993).
31. D. B. Oakes, J. E. Butler, K. A. Snail, W. A. Carrington, and L. M. Hanssen, J. Appl. Phys. 69, 2602 (1991).
32. K. V. Ravi, J. Mater. Res. 7, 384 (1992).
33. X. H. Wang, W. Zhu, J. von Windheim, and J. T. Glass, J. Cryst. Growth 129, 45 (1993).
34. R. L. Stolk, M. M. J. W. van Herpen, J. J. Schermer, and J. J. ter Meulen (unpublished).
35. R. J. H. Klein-Douwel and J. J. ter Meulen, J. Appl. Phys. 83, 4734 (1998).
36. C. A. Wolden, C. E. Draper, Z. Sitar, and J. T. Prater, Diamond Relat. Mater. 7, 1178 (1998).