Nitridation of GaP(001) surface by electron cyclotron resonance assisted N2 plasma

Applied Physics Letters

Volumn 75, Issue 5, 1999, Pages 615-617

  Hashizume, Tamotsu ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000687249     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124458     Document Type: Article

References (11)

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