Preservation of atomically clean silicon surfaces in air by contact bonding

Applied Physics Letters

Volumn 71, Issue 23, 1997, Pages 3400-3402

  Grey, François ^a   Hermansson, Karin ^a,b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b BCO Technologies (NI) Ltd   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000650378     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120348     Document Type: Article

References (19)

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