Optical diagnostics of RF argon and xenon magnetron discharges

Journal de Physique III

Volumn 7, Issue 9, 1997, Pages 1869-1876

  Dony, M F ^a   Debal, F ^a   Wautelet, M ^b   Dauchot, J P ^b   Hecq, M ^b   Bretagne, J ^c   Leray, P ^c   Ricard, A ^c  

^a UNIVERSITY OF MONS   (Belgium)

^b UNIVERSITÉ PARIS SUD   (France)

^c UNIVERSITÉ DE TOULOUSE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; ALUMINUM; ARGON; BORON COMPOUNDS; ELECTRONIC DENSITY OF STATES; EMISSION SPECTROSCOPY; MAGNETRON SPUTTERING; XENON;

BORON NITRIDE; MAGNETRON DISCHARGES; OPTICAL DIAGNOSTICS;

PLASMA DIAGNOSTICS;

EID: 0031237766     PISSN: 11554320     EISSN: None     Source Type: Journal    
DOI: 10.1051/jp3:1997228     Document Type: Article

References (7)

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3. Dony M.F., Ricard A., Wautelet M., Dauchot J.P. and Hecq M., Comparison of DC and RF argon magnetron discharges by optical emission and absorption spectroscopy, J. Vac. Sci. Techn., in press.
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