Effects of insulator surface roughness on Al-alloy film properties and crystallographic orientation in Al-alloy/Ti/insulator structure

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 1996, Pages 139-147

  Onoda, Hiroshi ^a   Narita, Tadashi ^a   Touchi, Kenshin ^a   Hashimoto, Keiichi ^a  

^a OKI ELECTRIC INDUSTRY CO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC INSULATING MATERIALS; ELECTRIC WIRING; ELECTROMIGRATION; SURFACE ROUGHNESS; TEXTURES;

ELECTROMIGRATION INDUCED FAILURE; LAYERED INTERCONNECTS;

METALLIC FILMS;

EID: 0029706049     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/relphy.1996.492074     Document Type: Conference Paper

References (7)