Deposition of thin films of Gallium sulfide from a novel liquid single-source precursor, Ga(SOCNEt2)3, by aerosol-assisted CVD

Chemical Vapor Deposition

Volumn 5, Issue 5, 1999, Pages 203-205

  Horley, Graeme A ^a,b   Lazell, Mike R ^a   O'Brien, Paul ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

^b University of Bath Claverton Down   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000583706     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(sici)1521-3862(199910)5:5<203::aid-cvde203>3.0.co;2-l     Document Type: Article

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