메뉴 건너뛰기




Volumn 10, Issue 2, 1998, Pages 650-657

Metal-Organic Chemical Vapor Deposition of Indium Selenide Thin Films

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000940941     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm970638i     Document Type: Article
Times cited : (44)

References (64)
  • 8
    • 85033935768 scopus 로고    scopus 로고
    • -1)
    • -1).
  • 10
    • 0039557927 scopus 로고
    • The electronic properties of each indium selenide are also dependent on the polytype, see for example: (a) Likforman, A.; Fourcroy, P. H.; Guittard, M.; Flahant, J.; Poirier, R.; Szydlo, N. J. Solid State Chem. 1980, 33, 91. (b) Julien, C.; Chevy, A.; Siapkas, D. Phys. Status Solidi A 1990, 118, 553. Persin, M.., Persm, A.; Celustka, B. Thin Solid Films 1972, 11, 153.
    • (1980) J. Solid State Chem. , vol.33 , pp. 91
    • Likforman, A.1    Fourcroy, P.H.2    Guittard, M.3    Flahant, J.4    Poirier, R.5    Szydlo, N.6
  • 11
    • 0025415197 scopus 로고
    • The electronic properties of each indium selenide are also dependent on the polytype, see for example: (a) Likforman, A.; Fourcroy, P. H.; Guittard, M.; Flahant, J.; Poirier, R.; Szydlo, N. J. Solid State Chem. 1980, 33, 91. (b) Julien, C.; Chevy, A.; Siapkas, D. Phys. Status Solidi A 1990, 118, 553. Persin, M.., Persm, A.; Celustka, B. Thin Solid Films 1972, 11, 153.
    • (1990) Phys. Status Solidi A , vol.118 , pp. 553
    • Julien, C.1    Chevy, A.2    Siapkas, D.3
  • 12
    • 0015371267 scopus 로고
    • The electronic properties of each indium selenide are also dependent on the polytype, see for example: (a) Likforman, A.; Fourcroy, P. H.; Guittard, M.; Flahant, J.; Poirier, R.; Szydlo, N. J. Solid State Chem. 1980, 33, 91. (b) Julien, C.; Chevy, A.; Siapkas, D. Phys. Status Solidi A 1990, 118, 553. (c) Persin, M.., Persm, A.; Celustka, B. Thin Solid Films 1972, 11, 153.
    • (1972) Thin Solid Films , vol.11 , pp. 153
    • Persin, M.1    Persm, A.2    Celustka, B.3
  • 13
    • 85033935982 scopus 로고    scopus 로고
    • 3: a = 4.025, c = 9.6-28.5 Å
    • 3: a = 4.025, c = 9.6-28.5 Å.
  • 28
    • 5344253022 scopus 로고
    • See for example: (a) Matsushita, T.; Nang, T. T.; Okuda, M.; Suzuki, A.; Yokota, S. Jpn. J. Appl. Phys. 1976, 15, 901. (b) Tatsuyama, C.; Tanbo, T.; Nakayama, N. Appl. Surf. Sci. 1989, 41/42, 539. (c) Martinez-Pastor, J.; Segura, A.; Valdes, J. L.; Chevy, A. J. Appl. Phys. 1987, 62, 1477.
    • (1976) Jpn. J. Appl. Phys. , vol.15 , pp. 901
    • Matsushita, T.1    Nang, T.T.2    Okuda, M.3    Suzuki, A.4    Yokota, S.5
  • 29
    • 0024764979 scopus 로고
    • See for example: (a) Matsushita, T.; Nang, T. T.; Okuda, M.; Suzuki, A.; Yokota, S. Jpn. J. Appl. Phys. 1976, 15, 901. (b) Tatsuyama, C.; Tanbo, T.; Nakayama, N. Appl. Surf. Sci. 1989, 41/42, 539. (c) Martinez-Pastor, J.; Segura, A.; Valdes, J. L.; Chevy, A. J. Appl. Phys. 1987, 62, 1477.
    • (1989) Appl. Surf. Sci. , vol.41-42 , pp. 539
    • Tatsuyama, C.1    Tanbo, T.2    Nakayama, N.3
  • 30
    • 0000944545 scopus 로고
    • See for example: (a) Matsushita, T.; Nang, T. T.; Okuda, M.; Suzuki, A.; Yokota, S. Jpn. J. Appl. Phys. 1976, 15, 901. (b) Tatsuyama, C.; Tanbo, T.; Nakayama, N. Appl. Surf. Sci. 1989, 41/42, 539. (c) Martinez-Pastor, J.; Segura, A.; Valdes, J. L.; Chevy, A. J. Appl. Phys. 1987, 62, 1477.
    • (1987) J. Appl. Phys. , vol.62 , pp. 1477
    • Martinez-Pastor, J.1    Segura, A.2    Valdes, J.L.3    Chevy, A.4
  • 52
    • 85033904684 scopus 로고    scopus 로고
    • y, was observed; see ref 23
    • y, was observed; see ref 23.
  • 54
    • 85033912848 scopus 로고    scopus 로고
    • Non-SI units: 1 Torr = 1 mmHg = 133 Pa
    • Non-SI units: 1 Torr = 1 mmHg = 133 Pa.
  • 57
    • 85033912659 scopus 로고    scopus 로고
    • 3, whose decomposition would result in the formation of an In-rich film
    • 3, whose decomposition would result in the formation of an In-rich film.
  • 59
    • 85033921568 scopus 로고    scopus 로고
    • 4
    • 4.
  • 64
    • 85033907070 scopus 로고    scopus 로고
    • 3 may be readily prepared by both CVD and PVD methods
    • 3 may be readily prepared by both CVD and PVD methods.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.