Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 811-814

  Lee, Jin Ho ^a   Song, Yoon Ho ^a   Kang, Seung Youl ^a   Kim, Sang Gi ^a   Cho, Kyoung Ik ^a   Yoo, Hyung Joun ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000573616     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589911     Document Type: Article

References (7)

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