Second harmonic spectroscopy of Si(001) surfaces: Sensitivity to surface hydrogen and doping, and applications to kinetic measurements

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1059-1064

  Xu, Z ^a   Hu, X F ^a   Lim, D ^a   Ekerdt, J G ^b   Downer, M C ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

^b The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000565772     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589415     Document Type: Article

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