The generation and detection of high flux atomic oxygen for physical vapor deposition thin film growth

Applied Physics Letters

Volumn 75, Issue 26, 1999, Pages 4162-4164

  Ingle, N J C ^a   Hammond, R H ^a   Beasley, M R ^a   Blank, D H A ^b  

^a STANFORD UNIVERSITY   (United States)

^b UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000552364     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125569     Document Type: Article

References (18)

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