Role of ozone in reactive coevaporation of lead zirconate titanate thin films

Journal of Materials Research

Volumn 13, Issue 4, 1998, Pages 1015-1021

  Torii, Kazuyoshi ^a   Yano, Fumiko ^a   Fujisaki, Yoshihisa ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; DEPOSITION; EVAPORATION; LEAD COMPOUNDS; OXIDATION; OXYGEN; OZONE; SUBSTRATES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

LEAD ZIRCONATE TITANATE; OXIDATION STATE; OZONE FLUX; REACTIVE COEVAPORATION;

THIN FILMS;

EID: 0032050655     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0142     Document Type: Article

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