Fabrication of metal field emitter arrays for low voltage and high current operation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 807-810

  Oh, Chang Woo ^a   Lee, Chun Gyoo ^a   Park, Byung Gook ^a   Lee, Jong Duk ^a   Lee, Jong Ho ^b  

^a Seoul National University   (South Korea)

^b Wonkwang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000537312     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589910     Document Type: Article

References (7)

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5. S. Wolf, Silicon Processing for the VLSI Era, Vol. 2: Process Integration (Lattice, Sunset Beach, 1990), pp. 17-44.
6. J. Hui, T. Y. Chiu, S. Wong, and W. G. Oldham, IEEE Electron Device Lett. 2, 244 (1981).
7. J. Hui, T. Y. Chiu, S. Wong, and W. G. Oldham, IEEE Trans. Electron Devices 29, 554 (1982).