Deposition probe technique for the determination of film thickness uniformity

Review of Scientific Instruments

Volumn 69, Issue 9, 1998, Pages 3353-3356

  Bilek, M M M ^a   Brown, I G ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000524801     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149100     Document Type: Article

References (9)

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