Effect of the Microstructure of Copper Films on the Damping of Oscillating Quartz Resonators

Zeitschrift fur Physikalische Chemie

Volumn 208, Issue Part_1_2, 1999, Pages 225-238

  Wunsche M ^a   Meyer, H ^a   Schumacher, R ^a   Wasle, S ^b   Doblhofer, K ^b  

^a ATOTECH DEUTSCHLAND GMBH   (Germany)

^b FRITZ HABER INSTITUT DER MAX PLANCK GESELLSCHAFT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; CRYSTAL RESONATORS; CRYSTALLINITY; DAMPING; ENERGY DISSIPATION; MECHANICAL PROPERTIES; METALLIC FILMS; QUARTZ; RESONATORS; SOLID SOLUTIONS; SURFACE ROUGHNESS;

DAMPING RESISTANCE; DISSIPATION FACTORS; EFFECT OF THE MICROSTRUCTURES; ELECTRICAL AND MECHANICAL PROPERTIES; IMPEDANCE SPECTRUM; LUMPED-ELEMENT CIRCUITS; QUARTZ MICROBALANCE; QUARTZ OSCILLATOR;

FILM PREPARATION;

EID: 0000484463     PISSN: 09429352     EISSN: None     Source Type: Journal    
DOI: 10.1524/zpch.1999.208.Part_1_2.225     Document Type: Article

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