Studies of boron diffusivity in strained Si1 - xGex epitaxial layers

Journal of Applied Physics

Volumn 89, Issue 2, 2001, Pages 980-987

  Rajendran, K ^a   Schoenmaker, W ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000476732     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1332803     Document Type: Article

References (22)

1. P. Kringhoj, A. N. Larsen, and S. Y. Shirayev, Phys. Rev. Lett. 76, 3372 (1996).
2. N. Moriya, L. C. Feldman, H. S. Luftman, C. A. King, J. Bevk, and B. Freer, Phys. Rev. Lett. 71, 883 (1993).
3. N. E. B. Cowern, P. C. Zalm, P. Vander Sluis, D. J. Gravesteijn, and W. B. de Boer, Phys. Rev. Lett. 72, 2585 (1994).
4. P. Kuo, J. L. Hoyt, J. F. Gibbons, J. E. Turner, and D. Lefforge, Appl. Phys. Lett. 66, 580 (1995).
5. A. Antonelli and J. Bernhole, Mater. Res. Soc. Symp. Proc. 163, 523 (1990).
6. A. N. Larsen and J. Bernhloc, Phys. Rev. B 40, 10643 (1989).
7. G. H. Loechelt, G. Tam, J. W. Steele, K. K. Knock, K. M. Klein, J. K. Watanabe, and J. W. Chrisiansen, J. Appl. Phys. 74, 5520 (1993).
8. R. F. Lever, J. M. Bonar, and A. F. W. Willoughby, J. Appl. Phys. 83, 1988 (1998).
9. V. I. Kol'dyaev, IMEC internal report (unpublished).
10. F. F. Morehead and R. F. Lever, Appl. Phys. Lett. 48, 151 (1986).
11. L. J. Can Ijzendoorn et al., Nucl. Instrum. Methods Phys. Res. B 50, 127 (1990).
12. P. Kuo, J. L. Hoyt, J. F. Gibbons, J. E. Turner, and D. Lefforge, Appl. Phys. Lett. 62, 612 (1993).
13. D. K. Sadanam, D. C. Ahlgren, P. A. Ronsheim, and J. O. Chu, Phys. Rev. Lett. 67, 1450 (1991).
14. S. M. Hu, D. C. Ahlgren, P. A. Ronsheim, and J. O. Chu, Phys. Rev. Lett. 67, 1450 (1991).
15. W. P. Maszada and T. Thompson, J. Appl. Phys. 72, 4477 (1992).
16. S. C. Jain, Silicon Germanium Strained Layers and Heterostructures (Academic. New York, 1994).
17. Taurus process/device. Avant! Corporation, 1998.
18. M. J. Caturla, Comput. Mater. Sci. 12, 319 (1998).
19. A. S. Solm and F. Baruffaldi, J. Appl. Phys. 69, 2135 (1991).
20. P. Kuo, J. L. Hoyt, J. F. Gibbons, J. E. Turner, and D. Lefforge, Appl. Phys. Lett. 67, 706 (1995).
21. R. People, Phys. Rev. B 32, 1405 (1985).
22. P. M. Fahey, P. B. Griffin, and J. D. Plummer, Rev. Mod. Phys. 61, 289 (1989).