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Volumn 86, Issue 9, 1999, Pages 5293-5295

Abnormal junction leakage characteristics in titanium-capped cobalt disilicide

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EID: 0000460629 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.371513 Document Type: Article

Times cited : (6)

References (10)

1
- 3242854784
- K. Mae, Mater. Sci. Eng., R. R11, 53 (1993).
- (1993) Mater. Sci. Eng., R. , vol.R11 , pp. 53
- Mae, K.¹

2
- 84886447960
- Q. Z. Hong, W. T. Shiau, H. Yang, J. A. Kittle, C. P. Chao, H. L. Tsai, S. Krishan, I. C. Chen, and R. H. Havemann, Tech. Dig. Int. Electron Devices Meet. 107 (1997).
- (1997) Tech. Dig. Int. Electron Devices Meet. , pp. 107
- Hong, Q.Z.¹ Shiau, W.T.² Yang, H.³ Kittle, J.A.⁴ Chao, C.P.⁵ Tsai, H.L.⁶ Krishan, S.⁷ Chen, I.C.⁸ Havemann, R.H.⁹

3
- 0028712880
- F. Hong and G. A. Rozgonyi, J. Electrochem. Soc. 141, 3480 (1994).
- (1994) J. Electrochem. Soc. , vol.141 , pp. 3480
- Hong, F.¹ Rozgonyi, G.A.²

4
- 36449003277
- A. Vantomme, M.-A. Nicolet, and N. D. Theodore, J. Appl. Phys. 75, 3882 (1991).
- (1991) J. Appl. Phys. , vol.75 , pp. 3882
- Vantomme, A.¹ Nicolet, M.-A.² Theodore, N.D.³

5
- 0032048902
- J. P. Gambino, E. G. Colgan, A. G. Domenicucci, and B. Cunnigham, J. Electrochem. Soc. 145, 1384 (1998).
- (1998) J. Electrochem. Soc. , vol.145 , pp. 1384
- Gambino, J.P.¹ Colgan, E.G.² Domenicucci, A.G.³ Cunnigham, B.⁴

6
- 0029736577
- Q. F. Wang, A. Lauwers, F. Jonckx, M. de Potter, C. C. Chen, and K. Maex, Mater. Res. Soc. Symp. Proc. 402, 221 (1996).
- (1996) Mater. Res. Soc. Symp. Proc. , vol.402 , pp. 221
- Wang, Q.F.¹ Lauwers, A.² Jonckx, F.³ De Potter, M.⁴ Chen, C.C.⁵ Maex, K.⁶

7
- 0000864669
- D. K. Sohn, J. Park, B, H. Lee, J. Bae, J. S. Byun, and J. J. Kim, Appl. Phys. Lett. 73, 2302 (1998).
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2302
- Sohn, D.K.¹ Park, J.² Lee, B.H.³ Bae, J.⁴ Byun, J.S.⁵ Kim, J.J.⁶

8
- 0038896753
- T. Yoshida, H. Kawahara, and S. Ogawa, J. Appl. Phys. 76, 5272 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 5272
- Yoshida, T.¹ Kawahara, H.² Ogawa, S.³

9
- 0032621462
- C. Y. Kang, W. J. Cho, D. G. Kang, Y. J. Lee, and J. M. Hwang, Appl. Phys. Lett. 74, 1833 (1999).
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1833
- Kang, C.Y.¹ Cho, W.J.² Kang, D.G.³ Lee, Y.J.⁴ Hwang, J.M.⁵

10
- 0000741829
- H. D. Lee, S. G. Lee, S. H. Lee, Y. J. Lee, and J. M. Hwang, Jpn. J. Appl. Phys., Part 1 37, 1179 (1998).
- (1998) Jpn. J. Appl. Phys., Part 1 , vol.37 , pp. 1179
- Lee, H.D.¹ Lee, S.G.² Lee, S.H.³ Lee, Y.J.⁴ Hwang, J.M.⁵

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