Adsorption of al on si(100) at high temperature

Physical Review B - Condensed Matter and Materials Physics

Volumn 59, Issue 15, 1999, Pages 9760-9763

  Misawa, Shunji ^c   Tsukahara, Sonoko ^c  

^a INSTITUTE OF PHYSICS   (China)

^b UNIVERSITY OF TOKYO   (Japan)

^c ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000321865     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.59.9760     Document Type: Article

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