Emission characteristics of a conical field emission gun

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 5, 1998, Pages 2871-2875

  Yamamoto, Youiti ^a   Miyokawa, Toshiaki ^a  

^a JEOL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000308966     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590286     Document Type: Article

References (12)

1. A. V. Crewe, D. N. Eggenberger, J. Wall, and L. M. Welter, Rev. Sci. Instrum. 39, 576 (1968).
2. J. W. Butler, Proceedings of the 6th International Congr. Electron Microscope, Kyoto, 1966, Vol. 1, p. 191.
3. A. V. Crewe, M. Isaacson, and D. Johnson, Rev. Sci. Instrum. 40, 241 (1969).
4. T. Suganuma and H. Hashimoto, Proceedings of the 5th European Congr. Electron Microscope, Manchester, 1972, Vol. 1, p. 56.
5. T. Komoda and S. Saito, Proceedings of the 5th SEM Symposium, IIT-RI, Chicago, 1972, p. 129.
6. Y. Yamamoto, A. Yamada, and T. Neghisi, Scanning 19, 505 (1997).
7. E. Munro, Proceedings of the 5th European Congr. Electron Microscope, Manchester, 1972, Vol. 1, p. 22.
8. A. Tonomura, Jpn. J. Appl. Phys. 12, 1065 (1973).
9. T. Miyokawa, S. Norioka, and S. Goto, Proceedings of the 46th Annual Meeting of the Electron Microscopy Society of America, Milwaukee, 1988, Vol. 1, p. 978.
10. R. H. Fowler and L. Nordheim, Proc. R. Soc. London, Ser. A 119, 173 (1928).
11. R. Gomer, Surf. Sci. 299/300, 129 (1994).
12. S. Yamamoto, S. Fukuhara, H. Okano, and N. Saito, Jpn. J. Appl. Phys. 15, 1643 (1976).