Optimization of experimental operating parameters for very high resolution focused ion beam applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2373-2378

  Gierak, J ^a   Vieu, C ^a   Schneider, M ^a   Launois, H ^a   Assayag, G Ben ^b   Septier, A ^c  

^a CNRS   (France)

^b CEMES CNRS   (France)

^c Bioinformatique et Chimie Moléculaire   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000253096     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589650     Document Type: Article

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