Cathodoluminescence measurements of suboxide band-tail and Si dangling bond states at ultrathin Si-SiO2 interfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 4, 1998, Pages 2177-2181

  Young, A P ^a   Schafer J ^b   Jessen, G H ^a   Bandhu, R ^b   Brillson, L J ^a,b   Lucovsky, G ^c   Niimi, H ^c  

^a Ohio State University   (United States)

^b OHIO STATE UNIVERSITY   (United States)

^c North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000250741     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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