Germanium-rich SiGe bulk single crystals grown by the vertical Bridgman method and by zone melting

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1627-1630

  Barz, A ^a   Dold, P ^a   Kerat, U ^a   Recha, S ^a   Benz, K W ^a   Franz, M ^b   Pressel, K ^b  

^a UNIVERSITY OF FREIBURG   (Germany)

^b IHP   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000219277     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589950     Document Type: Article

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