Deposition, microstructure and properties of sputtered copper films containing insoluble molybdenum

Journal of Applied Physics

Volumn 85, Issue 9, 1999, Pages 6462-6469

  Chu, J P ^a   Lin, T N ^a  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000211721     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.370287     Document Type: Article

References (22)

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