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Applied Physics Letters

Volumn 69, Issue 13, 1996, Pages 1915-1917

Synthesis of SiGe and SiGeC alloys formed by Ge and C implantation

(2) Lu, Xiang a Cheung, Nathan W a

a UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000156860 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.117620 Document Type: Article

Times cited : (15)

References (16)

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