A kinetic Monte-Carlo study of the effective diffusivity of the silicon self-interstitial in the presence of carbon and boron

Journal of Applied Physics

Volumn 84, Issue 4, 1998, Pages 1963-1967

  Johnson, M D ^a,b   Caturla, M J ^a   Diaz De La Rubia T ^a  

^a LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^b SYNOPSYS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000148543     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.368328     Document Type: Article

References (35)

1. A. Lilak et al. (unpublished).
2. L. Pelaz et al., Appl. Phys. Lett. 70, 2285 (1997).
3. K. J. van Oostrum et al., Appl. Phys. Lett. 61, 1513 (1992).
4. H. Bracht, N. A. Stolwijk, and H. Mehrer, Proc. Electrochem. Soc. 94-10, 593 (1994).
5. H.-J. Gossmann et al., Appl. Phys. Lett. 63, 639 (1993).
6. N. E. B. Cowern, Appl. Phys. Lett. 64, 2646 (1994).
7. G. D. Watkins and K. L. Brower, Phys. Rev. Lett. 36, 1329 (1976).
8. L. W. Song and G. D. Watkins, Phys. Rev. B 42, 5759 (1990).
9. L. W. Song, X. D. Zhan, B. W. Benson, and G. D. Watkins, Phys. Rev. B 42, 5765 (1990).
10. G. Davies, K. T. Kun, and T. Reade, Phys. Rev. B 44, 12 146 (1991).
11. S. Libertino et al., Appl. Phys. Lett. 70, 3002 (1997).
12. J. Zhu et al., Phys. Rev. B 54, 4741 (1996).
13. C. S. Nichols, C. G. V. de Walle, and S. T. Pantelides, Phys. Rev. Lett. 62, 5854 (1989).
14. E. Tarnow, Europhys. Lett. 17, 157 (1992).
15. P. A. Stolk et al., Appl. Phys. Lett. 66, 568 (1995).
16. S. Nishikawa, A. Tanaka, and T. Yamaji, Appl. Phys. Lett. 60, 2270 (1992).
17. H. L. Heinisch, J. Nucl. Mater. 117, 46 (1983).
18. J. Zhu, T. Díaz de la Rubia, and C. Mailhiot, Mater. Res. Soc. Symp. Proc. 439, 59 (1997).
19. G. H. Gilmer, T. Díaz de la Rubia, D. M. Stock, and M. Jaraiz, Nucl. Instrum. Methods Phys. Res. B 102, 247 (1995).
20. F. F. Morehead, in Defects in Electronic Materials, edited by M. Stavola, S. J. Pearton, and G. Davies (Materials Research Society, Pittsburgh, 1988), p. 99.
21. H. Zimmermann and H. Ryssel, Appl. Phys. A 55, 121 (1992).
22. W. Wijaranakula, J. Appl. Phys. 67, 7624 (1990).
23. G. B. Bronner and J. D. Plummer, J. Appl. Phys. 61, 5286 (1987).
24. T. Y. Tan and U. Gosele, Appl. Phys. A 37, 1 (1985).
25. C. Boit, F. Lau, and R. Sittig, Appl. Phys. A 50, 197 (1990).
26. K. Taniguchi, D. A. Antoniadis, and Y. Matsushita, Appl. Phys. Lett. 42, 961 (1983).
27. K. Ghaderi et al., J. Appl. Phys. 77, 1320 (1995).
28. H.-J. Gossmann et al., J. Appl. Phys. 77, 1948 (1995).
29. A. M. Agarwal and S. T. Dunham, Appl. Phys. Lett. 63, 800 (1993).
30. P. B. Griffin, P. M. Fahey, J. D. Plummer, and R. W. Dutton, Appl. Phys. Lett. 47, 319 (1985).
31. J. Zhu, Mater. Res. Soc. Symp. Proc. (in press).
32. P. M. Fahey, P. B. Griffin, and J. D. Plummer, Rev. Mod. Phys. 61, 289 (1989).
33. R. K. Jain and R. V. Overstraeten, J. Appl. Phys. 44, 2437 (1973).
34. N. D. Thai, J. Appl. Phys. 41, 2859 (1970).
35. M. D. Giles, IEEE Trans. Comput.-Aided Des. 8, 466 (1989).