MOCVD of aluminum oxide/hydroxide onto organic self-assembled monolayers

Chemical Vapor Deposition

Volumn 5, Issue 4, 1999, Pages 165-170

  Wohlfart, Peter ^a   Weiß, Jurij ^b   Käshammer, Josua ^a   Kreiter, Maximilian ^a   Winter, Carl ^b   Fischer, Roland ^b   Mittler Neher, Silvia ^a  

^a MAX PLANCK INSTITUTE FOR POLYMER RESEARCH   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

AlxOyHz; MOCVD; Multilayer system; Self assembled monolayers

Indexed keywords

EID: 0000117005     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-3862(199908)5:4<165::AID-CVDE165>3.0.CO;2-Q     Document Type: Article

References (18)

1. A. Ulman, Chem. Rev. 1996, 96, 1533.
2. A. Ulman, An Introduction to Ultrathin Organic Films, Academic, San Diego, CA 1991.
3. D. L. Allara, R. G. Nuzzo, Langmuir 1985, 1, 45.
4. D. L. Allara, R. G. Nuzzo, Langmuir 1985, 1, 52.
5. H. Ogawa, T. Chihera, K. Taya, J. Am. Chem. Soc. 1985, 107, 1365.
6. M. C. Petty, Langmuir-Blodgett Films: An Introduction, Cambridge University Press, Cambridge 1996.
7. T. Kodas, M. Hampden-Smith, The Chemistry of Metal CVD, VCH, Weinheim 1994.
8. J. Weiss, H.-J. Himmel, R. A. Fischer, C. Wöll, Chem. Vap. Deposition 1998, 4, 17.
9. H. Volkmann, Handbuch der Infrarot-Spektroskopie, Verlag Chemie, Weinheim 1972.
10. CRC Handbook of Chemistry and Physics, 66th ed. (Ed: R. C. Weast), CRC Press, Boca Raton, FL 1985.
11. C.E. Miller, W. H. Meyer, W. Knoll, G. Wegner, Ber. Bunsenges. Physikal Chem. 1992, 96, 689.
12. H. Günzler, H. Bock, IR-Spektroskopie: eine Einführung, Verlag Chemie, Weinheim 1983.
13. M. W. Urban, Vibrational Spectroscopy of Molecules and Macromolecules on Surfaces, Wiley, New York 1993.
14. H. Voit, C. Schoppmann, D. Brandl, Phys. Rev. B 1993, 48, 17 517.
15. H. Raether, Surface Plasmons, Springer, Berlin 1988.
16. E. Kretschmann, Z. Phys. 1971, 241, 313.
17. J. Spinke, M. Liley, H.-J. Guder, L. Angermaier, W. Knoll, Langmuir 1993, 9, 1821.
18. J. Spinke, M. Liley, F.-J. Schmitt, H.-J. Guder, L. Angermaier, W. Knoll, J. Chem. Phys. 1993, 99, 7012.